Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators.
Journal
Nature communications
ISSN: 2041-1723
Titre abrégé: Nat Commun
Pays: England
ID NLM: 101528555
Informations de publication
Date de publication:
19 Oct 2021
19 Oct 2021
Historique:
received:
12
02
2021
accepted:
30
09
2021
entrez:
20
10
2021
pubmed:
21
10
2021
medline:
21
10
2021
Statut:
epublish
Résumé
The extreme miniaturization in NEMS resonators offers the possibility to reach an unprecedented resolution in high-performance mass sensing. These very low limits of detection are related to the combination of two factors: a small resonator mass and a high quality factor. The main drawback of NEMS is represented by the highly complex, multi-steps, and expensive fabrication processes. Several alternatives fabrication processes have been exploited, but they are still limited to MEMS range and very low-quality factor. Here we report the fabrication of rigid NEMS resonators with high-quality factors by a 3D printing approach. After a thermal step, we reach complex geometry printed devices composed of ceramic structures with high Young's modulus and low damping showing performances in line with silicon-based NEMS resonators ones. We demonstrate the possibility of rapid fabrication of NEMS devices that present an effective alternative to semiconducting resonators as highly sensitive mass and force sensors.
Identifiants
pubmed: 34667168
doi: 10.1038/s41467-021-26353-1
pii: 10.1038/s41467-021-26353-1
pmc: PMC8526607
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
6080Subventions
Organisme : Ministero dell'Istruzione, dell'Università e della Ricerca (Ministry of Education, University and Research)
ID : PRIN2017 - Prot.20172TZHYX
Organisme : EC | EU Framework Programme for Research and Innovation H2020 | H2020 Priority Excellent Science | H2020 Future and Emerging Technologies (H2020 Excellent Science - Future and Emerging Technologies)
ID : FET Open "Boheme" Grant No.863179
Informations de copyright
© 2021. The Author(s).
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