Semiconductor Epitaxy in Superconducting Templates.
Semiconductor−superconductor hybrids
indium arsenide (InAs)
semiconductor epitaxy
template-assisted selective epitaxy
titanium nitride (TiN)
Journal
Nano letters
ISSN: 1530-6992
Titre abrégé: Nano Lett
Pays: United States
ID NLM: 101088070
Informations de publication
Date de publication:
08 Dec 2021
08 Dec 2021
Historique:
pubmed:
19
11
2021
medline:
19
11
2021
entrez:
18
11
2021
Statut:
ppublish
Résumé
Integration of high-quality semiconductor-superconductor devices into scalable and complementary metal-oxide-semiconductor compatible architectures remains an outstanding challenge, currently hindering their practical implementation. Here, we demonstrate growth of InAs nanowires monolithically integrated on Si inside lateral cavities containing superconducting TiN elements. This technique allows growth of hybrid devices characterized by sharp semiconductor-superconductor interfaces and with alignment along arbitrary crystallographic directions. Electrical characterization at low temperature reveals proximity induced superconductivity in InAs via a transparent interface.
Identifiants
pubmed: 34788993
doi: 10.1021/acs.nanolett.1c03133
pmc: PMC8662718
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
9922-9929Subventions
Organisme : NIEHS NIH HHS
ID : 27302C0028
Pays : United States
Références
Phys Rev Lett. 2015 Sep 18;115(12):127001
pubmed: 26431009
Nanotechnology. 2019 Feb 22;30(8):084004
pubmed: 30524107
Phys Rev Lett. 2010 Oct 22;105(17):177002
pubmed: 21231073
Phys Rev B Condens Matter. 1992 Nov 15;46(19):12841-12844
pubmed: 10003223
Nat Nanotechnol. 2014 Jan;9(1):79-84
pubmed: 24336403
Nat Mater. 2015 Apr;14(4):400-6
pubmed: 25581626
Nature. 2017 Aug 23;548(7668):434-438
pubmed: 28836603
Nat Mater. 2015 Sep;14(9):871-82
pubmed: 26288976
Phys Rev Lett. 2003 Jun 6;90(22):226806
pubmed: 12857335
Phys Rev Lett. 2003 Feb 28;90(8):087003
pubmed: 12633452
Phys Rev Lett. 2010 Aug 13;105(7):077001
pubmed: 20868069
Nat Commun. 2016 Sep 29;7:12841
pubmed: 27682268
Nat Nanotechnol. 2014 Sep;9(9):703-9
pubmed: 25017310
Nat Nanotechnol. 2015 Mar;10(3):232-6
pubmed: 25581886
Nano Lett. 2017 Apr 12;17(4):2596-2602
pubmed: 28334529
Nat Nanotechnol. 2021 Jul;16(7):776-781
pubmed: 33972757
Science. 2021 Apr 30;372(6541):508-511
pubmed: 33858990
Phys Rev Lett. 2015 Sep 18;115(12):127002
pubmed: 26431010
Science. 2015 Sep 11;349(6253):1199-202
pubmed: 26359397
Nanotechnology. 2019 Jul 19;30(29):294005
pubmed: 30947145
Adv Mater. 2020 Jun;32(23):e1908411
pubmed: 32337791
ACS Nano. 2020 Nov 24;14(11):14605-14615
pubmed: 32396328