Passivation of miniature microwave coplanar waveguides using a thin film fluoropolymer electret.
Journal
Scientific reports
ISSN: 2045-2322
Titre abrégé: Sci Rep
Pays: England
ID NLM: 101563288
Informations de publication
Date de publication:
16 Dec 2021
16 Dec 2021
Historique:
received:
24
06
2021
accepted:
01
12
2021
entrez:
17
12
2021
pubmed:
18
12
2021
medline:
18
12
2021
Statut:
epublish
Résumé
The insertion losses of miniature gold/silicon-on-insulator (SOI) coplanar waveguides (CPW) are rendered low, stable, and light insensitive when covered with a thin film (95 nm) fluoropolymer deposited by a trifluoromethane (CHF
Identifiants
pubmed: 34916566
doi: 10.1038/s41598-021-03540-0
pii: 10.1038/s41598-021-03540-0
pmc: PMC8677788
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
24111Informations de copyright
© 2021. The Author(s).
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