Quality factor control of mechanical resonators using variable phononic bandgap on periodic microstructures.
Journal
Scientific reports
ISSN: 2045-2322
Titre abrégé: Sci Rep
Pays: England
ID NLM: 101563288
Informations de publication
Date de publication:
10 Jan 2022
10 Jan 2022
Historique:
received:
29
09
2021
accepted:
16
12
2021
entrez:
11
1
2022
pubmed:
12
1
2022
medline:
12
1
2022
Statut:
epublish
Résumé
The quality factor (Q-factor) is an important parameter for mechanical resonant sensors, and the optimal values depend on its application. Therefore, Q-factor control is essential for microelectromechanical systems (MEMS). Conventional methods have some restrictions, such as additional and complicated equipment or nanoscale dimensions; thus, structural methods are one of the reasonable solutions for simplifying the system. In this study, we demonstrate Q-factor control using a variable phononic bandgap by changing the length of the periodic microstructure. For this, silicon microstructure is used because it has both periodicity and a spring structure. The bandgap change is experimentally confirmed by measuring the Q-factors of mechanical resonators with different resonant frequencies. The bandgap range varies depending on the extended structure length, followed by a change in the Q-factor value. In addition, the effects of the periodic structure on the Q-factor enhancement and the influence of stress on the structural length were evaluated. Although microstructures can improve the Q-factors irrespective of periodicity; the result of the periodic microstructure is found to be efficient. The proposed method is feasible as the novel Q-factor control technique has good compatibility with conventional MEMS.
Identifiants
pubmed: 35013538
doi: 10.1038/s41598-021-04459-2
pii: 10.1038/s41598-021-04459-2
pmc: PMC8748515
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
392Subventions
Organisme : JSPS KAKENHI
ID : H20H02588
Informations de copyright
© 2022. The Author(s).
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