Crosstalk-Free, High-Resolution Pressure Sensor Arrays Enabled by High-Throughput Laser Manufacturing.
crosstalk-free
laser manufacturing
pressure sensor array
serpentine interconnect
Journal
Advanced materials (Deerfield Beach, Fla.)
ISSN: 1521-4095
Titre abrégé: Adv Mater
Pays: Germany
ID NLM: 9885358
Informations de publication
Date de publication:
May 2022
May 2022
Historique:
revised:
23
03
2022
received:
17
01
2022
pubmed:
26
3
2022
medline:
28
5
2022
entrez:
25
3
2022
Statut:
ppublish
Résumé
Simultaneously achieving high spatial resolution and low crosstalk interference has been a fundamental challenge for flexible pressure sensor arrays. Here the authors present a high-resolution flexible pressure sensor array fabricated through a two-step laser manufacturing process, where individual sensing pixels and their interconnects are sequentially defined by laser-induced graphenization and ablation to minimize crosstalk interferences. The geometry of the interconnects is optimized through theoretical modeling and experimental validation. Characterization results show that the new device design induces a remarkable reduction of the crosstalk coefficient, from -8.21 to -43.63 dB, of the 0.7 mm-resolution sensor arrays, and the crosstalk suppression is particularly beneficial for application scenarios involving pressure sensing on soft surfaces (e.g., human skin and organs). Applications of the sensor array in tactile pattern recognition and minimally-invasive cancer surgery are demonstrated.
Identifiants
pubmed: 35332964
doi: 10.1002/adma.202200517
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
e2200517Subventions
Organisme : National Natural Science Foundation of China
ID : 51975127
Organisme : Fund of Research and Development Program of Guangdong Province
ID : 2020A0505140008
Informations de copyright
© 2022 Wiley-VCH GmbH.
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