Enhanced photonics devices based on low temperature plasma-deposited dichlorosilane-based ultra-silicon-rich nitride (Si

Journal

Scientific reports
ISSN: 2045-2322
Titre abrégé: Sci Rep
Pays: England
ID NLM: 101563288

Informations de publication

Date de publication:
28 Mar 2022
Historique:
received: 16 11 2021
accepted: 21 03 2022
entrez: 29 3 2022
pubmed: 30 3 2022
medline: 30 3 2022
Statut: epublish

Résumé

Ultra-silicon-rich nitride with refractive indices ~ 3 possesses high nonlinear refractive index-100× higher than stoichiometric silicon nitride and presents absence of two-photon absorption, making it attractive to be used in nonlinear integrated optics at telecommunications wavelengths. Despite its excellent nonlinear properties, ultra-silicon-rich nitride photonics devices reported so far still have fairly low quality factors of [Formula: see text], which could be mainly attributed by the material absorption bonds. Here, we report low temperature plasma-deposited dichlorosilane-based ultra-silicon-rich nitride (Si

Identifiants

DOI: 10.1038/s41598-022-09227-4 PMID: 35347190 PMC: PMC8960789
pubmed: 35347190
doi: 10.1038/s41598-022-09227-4
pii: 10.1038/s41598-022-09227-4
pmc: PMC8960789
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

5267

Subventions

Organisme : National Research Foundation Singapore
ID : NRF-CRP18-2017-03

Informations de copyright

© 2022. The Author(s).

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Auteurs

Doris K T Ng (DKT)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore, 138634, Singapore. Doris_NG@ime.a-star.edu.sg.

Hongwei Gao (H)

Photonics Device and Systems Group, Engineering Product Development, Singapore University of Technology and Design (SUTD), 8 Somapah Road, Singapore, 487372, Singapore.

Peng Xing (P)

Photonics Device and Systems Group, Engineering Product Development, Singapore University of Technology and Design (SUTD), 8 Somapah Road, Singapore, 487372, Singapore.

George F R Chen (GFR)

Photonics Device and Systems Group, Engineering Product Development, Singapore University of Technology and Design (SUTD), 8 Somapah Road, Singapore, 487372, Singapore.

Xavier X Chia (XX)

Photonics Device and Systems Group, Engineering Product Development, Singapore University of Technology and Design (SUTD), 8 Somapah Road, Singapore, 487372, Singapore.

Yanmei Cao (Y)

Photonics Device and Systems Group, Engineering Product Development, Singapore University of Technology and Design (SUTD), 8 Somapah Road, Singapore, 487372, Singapore.

Kenny Y K Ong (KYK)

Photonics Device and Systems Group, Engineering Product Development, Singapore University of Technology and Design (SUTD), 8 Somapah Road, Singapore, 487372, Singapore.

Dawn T H Tan (DTH)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore, 138634, Singapore. dawn_tan@sutd.edu.sg.
Photonics Device and Systems Group, Engineering Product Development, Singapore University of Technology and Design (SUTD), 8 Somapah Road, Singapore, 487372, Singapore. dawn_tan@sutd.edu.sg.

Classifications MeSH