Perovskite-Compatible Electron-Beam-Lithography Process Based on Nonpolar Solvents for Single-Nanowire Devices.
Journal
ACS applied nano materials
ISSN: 2574-0970
Titre abrégé: ACS Appl Nano Mater
Pays: United States
ID NLM: 101726750
Informations de publication
Date de publication:
25 Mar 2022
25 Mar 2022
Historique:
received:
12
01
2022
accepted:
18
02
2022
entrez:
4
4
2022
pubmed:
5
4
2022
medline:
5
4
2022
Statut:
ppublish
Résumé
Metal halide perovskites (MHPs) have been studied intensely as the active material for optoelectronic devices. Lithography methods for perovskites remain limited because of the solubility of perovskites in polar solvents. Here, we demonstrate an electron-beam-lithography process with a poly(methyl methacrylate) resist based on the nonpolar solvents
Identifiants
pubmed: 35372798
doi: 10.1021/acsanm.2c00188
pmc: PMC8961732
doi:
Types de publication
Journal Article
Langues
eng
Pagination
3177-3182Informations de copyright
© 2022 The Authors. Published by American Chemical Society.
Déclaration de conflit d'intérêts
The authors declare no competing financial interest.
Références
Adv Mater. 2017 Oct;29(40):
pubmed: 28845897
ACS Nano. 2021 Oct 26;15(10):16130-16138
pubmed: 34546712
Proc Natl Acad Sci U S A. 2018 Nov 20;115(47):11929-11934
pubmed: 30397127
ACS Nano. 2018 Feb 27;12(2):1611-1617
pubmed: 29309723
ACS Appl Nano Mater. 2022 Jan 28;5(1):881-889
pubmed: 35128340
Nat Commun. 2019 Feb 13;10(1):727
pubmed: 30760711
Adv Mater. 2018 Aug 23;:e1801743
pubmed: 30141200
J Am Chem Soc. 2017 Mar 29;139(12):4358-4361
pubmed: 28290681
ACS Nano. 2019 Feb 26;13(2):1168-1176
pubmed: 30588789
Nano Lett. 2017 Apr 12;17(4):2482-2489
pubmed: 28231011
Adv Mater. 2017 Apr;29(15):
pubmed: 28195440
Science. 2020 Feb 28;367(6481):1018-1021
pubmed: 32108108
ACS Nano. 2019 Apr 23;13(4):3823-3829
pubmed: 30794382
Proc Natl Acad Sci U S A. 2017 Jul 11;114(28):7216-7221
pubmed: 28652367
Adv Mater. 2018 Jun;30(23):e1707412
pubmed: 29696710
ACS Nano. 2020 Feb 25;14(2):1577-1585
pubmed: 31944666
Adv Mater. 2017 Mar;29(12):
pubmed: 28102599
J Phys Chem Lett. 2019 Oct 3;10(19):5836-5840
pubmed: 31525868