Quad-Level Cell Switching with Excellent Reliability in TiN/AlOx:Ti/TaOx/TiN Memory Device.

ISPP QLC ReRAM resistive switching

Journal

Materials (Basel, Switzerland)
ISSN: 1996-1944
Titre abrégé: Materials (Basel)
Pays: Switzerland
ID NLM: 101555929

Informations de publication

Date de publication:
24 Mar 2022
Historique:
received: 04 02 2022
revised: 11 03 2022
accepted: 21 03 2022
entrez: 12 4 2022
pubmed: 13 4 2022
medline: 13 4 2022
Statut: epublish

Résumé

TiN/AlOx:Ti/TaOx/TiN memory devices using bilayer resistive switching memory demonstrated excellent durability and capability of QLC (quad-level cell) memory devices. The best nonvolatile memory characteristics with the lowest operation current and optimized 4 bit/cell states were obtained using the Incremental Step Pulse Programming (ISPP) algorithm in array. As a result, a superior QLC reliability (cycle endurance > 1 k at each level of the QLC, data retention > 2 h at 125 °C) for all the 4 bits/cell operations was achieved in sub-μm scaled RRAM (resistive random access memory) devices.

Identifiants

pubmed: 35407734
pii: ma15072402
doi: 10.3390/ma15072402
pmc: PMC8999717
pii:
doi:

Types de publication

Journal Article

Langues

eng

Références

Nat Mater. 2007 Nov;6(11):833-40
pubmed: 17972938
Nat Mater. 2011 Jul 10;10(8):625-30
pubmed: 21743450
Nat Mater. 2010 May;9(5):403-6
pubmed: 20400954
Rep Prog Phys. 2012 Jul;75(7):076502
pubmed: 22790779
Nano Lett. 2009 Feb;9(2):870-4
pubmed: 19206536
Sci Rep. 2013;3:1657
pubmed: 23584551
Adv Mater. 2009 Jul 13;21(25-26):2632-2663
pubmed: 36751064
Nature. 2008 May 1;453(7191):80-3
pubmed: 18451858
Nanotechnology. 2011 Dec 2;22(48):485203
pubmed: 22071289
Nat Nanotechnol. 2008 Jul;3(7):429-33
pubmed: 18654568

Auteurs

Hee Ju Shin (HJ)

Artificial Intelligence Convergence Research Lab, Sahmyook University, Seoul 01795, Korea.
Semiconductor Research & Development, Samsung Electronics, Hwaseong 18448, Korea.

Hyun Kyu Seo (HK)

Artificial Intelligence Convergence Research Lab, Sahmyook University, Seoul 01795, Korea.

Su Yeon Lee (SY)

Artificial Intelligence Convergence Research Lab, Sahmyook University, Seoul 01795, Korea.

Minsoo Park (M)

Artificial Intelligence Convergence Research Lab, Sahmyook University, Seoul 01795, Korea.

Seong-Geon Park (SG)

Semiconductor Research & Development, Samsung Electronics, Hwaseong 18448, Korea.

Min Kyu Yang (MK)

Artificial Intelligence Convergence Research Lab, Sahmyook University, Seoul 01795, Korea.

Classifications MeSH