Role of polysilicon in poly-Si/SiO
Journal
RSC advances
ISSN: 2046-2069
Titre abrégé: RSC Adv
Pays: England
ID NLM: 101581657
Informations de publication
Date de publication:
23 Jul 2019
23 Jul 2019
Historique:
received:
12
05
2019
revised:
06
05
2020
accepted:
22
07
2019
entrez:
6
5
2022
pubmed:
26
7
2019
medline:
26
7
2019
Statut:
epublish
Résumé
In this study, we focused on understanding the roles of a polysilicon (poly-Si) layer in poly-Si/SiO
Identifiants
pubmed: 35514484
doi: 10.1039/c9ra03560e
pii: c9ra03560e
pmc: PMC9067244
doi:
Types de publication
Journal Article
Langues
eng
Pagination
23261-23266Commentaires et corrections
Type : ErratumIn
Informations de copyright
This journal is © The Royal Society of Chemistry.
Déclaration de conflit d'intérêts
There are no conflicts to declare.
Références
ACS Appl Mater Interfaces. 2016 Dec 28;8(51):35660-35667
pubmed: 27959489
Sci Rep. 2017 Oct 16;7(1):12853
pubmed: 29038448