Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes.

Electrical and electronic engineering Nanosensors

Journal

Microsystems & nanoengineering
ISSN: 2055-7434
Titre abrégé: Microsyst Nanoeng
Pays: England
ID NLM: 101695458

Informations de publication

Date de publication:
2022
Historique:
received: 25 01 2022
revised: 19 03 2022
accepted: 11 04 2022
entrez: 19 5 2022
pubmed: 20 5 2022
medline: 20 5 2022
Statut: epublish

Résumé

We present a new approach to tuning-fork-based atomic force microscopy for utilizing advanced "tip-on-chip" probes with high sensitivity and broad compatibility. Usually, such chip-like probes with a size reaching 2 × 2 mm

Identifiants

pubmed: 35586140
doi: 10.1038/s41378-022-00379-x
pii: 379
pmc: PMC9108095
doi:

Types de publication

Journal Article

Langues

eng

Pagination

51

Informations de copyright

© The Author(s) 2022.

Déclaration de conflit d'intérêts

Conflict of interestThe authors declare no competing interests.

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Auteurs

H Tunç Çiftçi (HT)

Department of Applied Physics, Eindhoven University of Technology, PO Box 513,, 5600 MB Eindhoven, the Netherlands.

Michael Verhage (M)

Department of Applied Physics, Eindhoven University of Technology, PO Box 513,, 5600 MB Eindhoven, the Netherlands.

Tamar Cromwijk (T)

Department of Applied Physics, Eindhoven University of Technology, PO Box 513,, 5600 MB Eindhoven, the Netherlands.

Laurent Pham Van (L)

DRF/IRAMIS/SPEC-LEPO, Centre CEA de Saclay, 91191 Gif-sur-Yvette, France.

Bert Koopmans (B)

Department of Applied Physics, Eindhoven University of Technology, PO Box 513,, 5600 MB Eindhoven, the Netherlands.

Kees Flipse (K)

Department of Applied Physics, Eindhoven University of Technology, PO Box 513,, 5600 MB Eindhoven, the Netherlands.

Oleg Kurnosikov (O)

Department of Applied Physics, Eindhoven University of Technology, PO Box 513,, 5600 MB Eindhoven, the Netherlands.
Institut Jean Lamour, Lorraine University, 54000 Nancy, France.

Classifications MeSH