Microfluidics for High Pressure: Integration on GaAs Acoustic Biosensors with a Leakage-Free PDMS Based on Bonding Technology.
PDMS- SiO2/GaAs bonding
acoustic biosensor
bonding technology
leakage test
microfluidics
microsystems
Journal
Micromachines
ISSN: 2072-666X
Titre abrégé: Micromachines (Basel)
Pays: Switzerland
ID NLM: 101640903
Informations de publication
Date de publication:
11 May 2022
11 May 2022
Historique:
received:
25
04
2022
revised:
07
05
2022
accepted:
09
05
2022
entrez:
28
5
2022
pubmed:
29
5
2022
medline:
29
5
2022
Statut:
epublish
Résumé
Microfluidics integration of acoustic biosensors is an actively developing field. Despite significant progress in "passive" microfluidic technology, integration with microacoustic devices is still in its research state. The major challenge is bonding polymers with monocrystalline piezoelectrics to seal microfluidic biosensors. In this contribution, we specifically address the challenge of microfluidics integration on gallium arsenide (GaAs) acoustic biosensors. We have developed a robust plasma-assisted bonding technology, allowing strong connections between PDMS microfluidic chip and GaAs/SiO
Identifiants
pubmed: 35630222
pii: mi13050755
doi: 10.3390/mi13050755
pmc: PMC9145980
pii:
doi:
Types de publication
Journal Article
Langues
eng
Références
Adv Mater. 2016 Jul;28(28):5830-6
pubmed: 27167137
Micromachines (Basel). 2021 May 18;12(5):
pubmed: 34070209
Nat Rev Drug Discov. 2012 Aug;11(8):620-32
pubmed: 22850786
Biosensors (Basel). 2021 May 07;11(5):
pubmed: 34067116
Sensors (Basel). 2010;10(7):6623-61
pubmed: 22163570
Lab Chip. 2021 Mar 7;21(5):962-975
pubmed: 33511381
RSC Adv. 2020 Apr 25;10(28):16502-16509
pubmed: 35498866
Lab Chip. 2015 Feb 7;15(3):690-5
pubmed: 25412449
Nat Biotechnol. 2019 Apr;37(4):389-406
pubmed: 30804534
Analyst. 2020 Oct 26;145(21):6887-6894
pubmed: 32820755
Biosens Bioelectron. 2019 Feb 15;127:142-149
pubmed: 30597432
Lab Chip. 2008 Aug;8(8):1357-64
pubmed: 18651079
Sci Rep. 2017 May 2;7(1):1366
pubmed: 28465615
Analyst. 2020 Jun 15;145(12):4204-4211
pubmed: 32459250
Nature. 2006 Jul 27;442(7101):412-8
pubmed: 16871209
Micromachines (Basel). 2016 Jun 09;7(6):
pubmed: 30404275
ACS Omega. 2021 Mar 12;6(11):7286-7295
pubmed: 33778243
Angew Chem Int Ed Engl. 2003 Feb 17;42(7):768-72
pubmed: 12596195
J Chromatogr A. 2008 Mar 14;1184(1-2):542-59
pubmed: 18207148
Lab Chip. 2015 May 7;15(9):2102-9
pubmed: 25824937
Micromachines (Basel). 2021 May 12;12(5):
pubmed: 34066183
Micromachines (Basel). 2016 Dec 14;7(12):
pubmed: 30404401
Lab Chip. 2009 Jun 7;9(11):1618-24
pubmed: 19458871
ACS Nano. 2013 Dec 23;7(12):10534-43
pubmed: 24191698
Biointerphases. 2016 Mar 02;11(2):019302
pubmed: 26934871
ACS Nano. 2021 May 25;15(5):8130-8141
pubmed: 33784064
Lab Chip. 2009 Apr 7;9(7):1002-4
pubmed: 19294314
Anal Chim Acta. 2021 Jun 15;1164:338321
pubmed: 33992219