Discharge characteristics of steady-state high-density plasma source based on cascade arc discharge with hollow cathode.
Journal
The Review of scientific instruments
ISSN: 1089-7623
Titre abrégé: Rev Sci Instrum
Pays: United States
ID NLM: 0405571
Informations de publication
Date de publication:
01 May 2022
01 May 2022
Historique:
entrez:
1
6
2022
pubmed:
2
6
2022
medline:
2
6
2022
Statut:
ppublish
Résumé
We developed a steady-state high-density plasma source by applying a hollow cathode to a cascade arc discharge device. The hollow cathode is made of a thermionic material (LaB
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM