Aberration-corrected transmission electron microscopy with Zernike phase plates.

We explore the possibility of applying physical phase plates (PPs) in combination with aberration-corrected transmission electron microscopy. Phase-contrast transfer characteristics are calculated and compared for a thin-film based Zernike PP, a hole-free (HF) or Volta PP and an electrostatic Zach PP, considering their phase-shifting properties in combination with partial spatial coherence. The effect of slightly converging illumination conditions, often used in high-resolution applications, on imaging with PPs is discussed. Experiments with an unheated Zernike PP applied to various nanomaterial specimens and a qualitative analysis clearly demonstrates the general compatibility of PPs and aberration-corrected transmission electron microscopy. Calculations and experiments show the benefits of the approach, among which is a strong phase-contrast enhancement of a large range of spatial frequencies. This allows the simultaneous imaging of atomic-resolution structures and morphological features at the nanometer scale, with maximum phase contrast. The calculations can explain why the HFPP damps contrast transfer at higher spatial frequencies.

Informations de copyright

Copyright © 2022 The Author(s). Published by Elsevier B.V. All rights reserved.