Spatial resolution in transmission electron microscopy.
Image contrast
Point-spread function
Resolution
STEM
TEM
Journal
Micron (Oxford, England : 1993)
ISSN: 1878-4291
Titre abrégé: Micron
Pays: England
ID NLM: 9312850
Informations de publication
Date de publication:
Sep 2022
Sep 2022
Historique:
received:
28
03
2022
revised:
05
05
2022
accepted:
19
05
2022
pubmed:
16
6
2022
medline:
16
6
2022
entrez:
15
6
2022
Statut:
ppublish
Résumé
We review the practical factors that determine the spatial resolution of transmission electron microscopy (TEM) and scanning-transmission electron microscopy (STEM), then enumerate the advantages of representing resolution in terms of a point-spread function. PSFs are given for the major resolution-limiting factors: aperture diffraction, spherical and chromatic aberration, beam divergence, beam broadening, Coulomb delocalization, radiolysis damage and secondary-electron generation from adatoms or atoms in a matrix. We note various definitions of beam broadening, complications of describing this effect in very thin specimens, and ways of optimizing the resolution in bright-field STEM of thick samples. Beam spreading in amorphous and crystalline materials is compared by means of simulations. For beam-sensitive specimens, we emphasize the importance of dose-limited resolution (DLR) and briefly recognize efforts to overcome the fundamental resolution limits set by the wave and particle properties of electrons.
Identifiants
pubmed: 35704972
pii: S0968-4328(22)00100-7
doi: 10.1016/j.micron.2022.103304
pii:
doi:
Types de publication
Journal Article
Review
Langues
eng
Sous-ensembles de citation
IM
Pagination
103304Informations de copyright
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