Single-Step-Lithography Micro-Stepper Based on Frictional Contact and Chiral Metamaterial.
3D micro-structuration
chiral metamaterials
clutch
friction
micro-stepper engines
Journal
Small (Weinheim an der Bergstrasse, Germany)
ISSN: 1613-6829
Titre abrégé: Small
Pays: Germany
ID NLM: 101235338
Informations de publication
Date de publication:
Jul 2022
Jul 2022
Historique:
revised:
21
05
2022
received:
04
05
2022
pubmed:
17
6
2022
medline:
17
6
2022
entrez:
16
6
2022
Statut:
ppublish
Résumé
Stepper motors and actuators are among the main constituents of control motion devices. They are complex multibody systems with rather large overall volume due to their multifunctional parts and elaborate technological assembly processes. Miniaturization of individual parts is still posing assembly problems. In this paper, a single-step lithography process to fabricate a micro-stepper engine with an accurate micrometric rotation axis and an overall sub-millimeter size is demonstrated. The device is based on the frictional contacts and chiral metamaterials to get rid of the dependence on the accuracy of parts. The functional aspects of fabricated samples are discussed for many rotation cycles and for different frictional surfaces.
Identifiants
pubmed: 35708218
doi: 10.1002/smll.202202128
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
e2202128Subventions
Organisme : EIPHI Graduate School
ID : ANR-17-EURE-0002
Organisme : French Investissements d'Avenir program, project ISITEBFC
ID : ANR-15-IDEX-03
Organisme : National Natural Science Foundation of China
ID : 11972008
Organisme : China Scholarship Council
Informations de copyright
© 2022 Wiley-VCH GmbH.
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