On-Chip Microwave Frequency Combs in a Superconducting Nanoelectromechanical Device.

Nanomechanical resonances coupled to microwave cavities can be excited, measured, and controlled simultaneously using electromechanical back-action phenomena. Examples of these effects include sideband cooling and amplification, which are commonly described through linear equations of motion governed by an effective optomechanical Hamiltonian. However, this linear approximation is invalid when the pump-induced cavity microwave field is large enough to trigger optomechanical nonlinearities, resulting in phenomena like frequency combs. Here, we employ a niobium-based superconducting electromechanical device to explore the generation of microwave frequency combs. We observe the formation of combs around a microwave resonant frequency (3.78 GHz) with 8-MHz frequency spacing, equal to the mechanical resonant frequency. We investigate their dynamics for different optomechanical parameters, including detuning, pump powers, and cavity decay rates. Our experimental results show excellent agreement with numerical modeling. These electromechanical frequency combs can be beneficial in nanomechanical sensing applications that require precise electrical tracking of mechanical resonant frequencies.