Direct-write formation of integrated bottom contacts to laser-induced graphene-like carbon.
additive manufacture
contact resistance
electrochemistry
laser-induced graphene
Journal
Nanotechnology
ISSN: 1361-6528
Titre abrégé: Nanotechnology
Pays: England
ID NLM: 101241272
Informations de publication
Date de publication:
14 Jul 2022
14 Jul 2022
Historique:
received:
06
01
2022
accepted:
28
06
2022
pubmed:
29
6
2022
medline:
29
6
2022
entrez:
28
6
2022
Statut:
epublish
Résumé
We report a simple, scalable two-step method for direct-write laser fabrication of 3D, porous graphene-like carbon electrodes from polyimide films with integrated contact plugs to underlying metal layers (Au or Ni). Irradiation at high average CO
Identifiants
pubmed: 35764059
doi: 10.1088/1361-6528/ac7c7b
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Informations de copyright
Creative Commons Attribution license.