Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics.
Q-factor
SOI microring resonator
conversion efficiency
four-wave mixing
Journal
Micromachines
ISSN: 2072-666X
Titre abrégé: Micromachines (Basel)
Pays: Switzerland
ID NLM: 101640903
Informations de publication
Date de publication:
21 Jul 2022
21 Jul 2022
Historique:
received:
30
06
2022
revised:
15
07
2022
accepted:
19
07
2022
entrez:
27
7
2022
pubmed:
28
7
2022
medline:
28
7
2022
Statut:
epublish
Résumé
A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 10
Identifiants
pubmed: 35888971
pii: mi13071155
doi: 10.3390/mi13071155
pmc: PMC9322067
pii:
doi:
Types de publication
Journal Article
Langues
eng
Subventions
Organisme : National Key Research and Development Program of China
ID : 2019YFB2203101
Organisme : National Natural Science Foundation of China
ID : 62175078
Organisme : National Natural Science Foundation of China
ID : 61775094
Organisme : National Natural Science Foundation of China
ID : 61675084
Organisme : State Key Laboratory of Advanced Optical Communication Systems and Networks
ID : 2021GZKF006
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