Miniaturized CO

CMOS compatible CO2 gas sensor MEMS abnormally oriented grains nondispersive infrared pyroelectric detector scandium aluminum nitride (ScAlN)

Journal

ACS sensors
ISSN: 2379-3694
Titre abrégé: ACS Sens
Pays: United States
ID NLM: 101669031

Informations de publication

Date de publication:
26 Aug 2022
Historique:
pubmed: 10 8 2022
medline: 10 8 2022
entrez: 9 8 2022
Statut: ppublish

Résumé

NDIR CO

Identifiants

pubmed: 35943904
doi: 10.1021/acssensors.2c00980
pmc: PMC9425554
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

2345-2357

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Auteurs

Doris Keh Ting Ng (DKT)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.

Linfang Xu (L)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.

Weiguo Chen (W)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.

Huanhuan Wang (H)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.

Zhonghua Gu (Z)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.

Xavier Xujie Chia (XX)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
Photonics Devices and Systems Group, Engineering Product Development, Singapore University of Technology and Design, 8 Somapah Road, Singapore 487372, Singapore.

Yuan Hsing Fu (YH)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.

Norhanani Jaafar (N)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.

Chong Pei Ho (CP)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.

Tantan Zhang (T)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.

Qingxin Zhang (Q)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.

Lennon Yao Ting Lee (LYT)

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.

Classifications MeSH