Miniaturized CO
CMOS compatible
CO2 gas sensor
MEMS
abnormally oriented grains
nondispersive infrared
pyroelectric detector
scandium aluminum nitride (ScAlN)
Journal
ACS sensors
ISSN: 2379-3694
Titre abrégé: ACS Sens
Pays: United States
ID NLM: 101669031
Informations de publication
Date de publication:
26 Aug 2022
26 Aug 2022
Historique:
pubmed:
10
8
2022
medline:
10
8
2022
entrez:
9
8
2022
Statut:
ppublish
Résumé
NDIR CO
Identifiants
pubmed: 35943904
doi: 10.1021/acssensors.2c00980
pmc: PMC9425554
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
2345-2357Références
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