Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems.
Journal
ACS photonics
ISSN: 2330-4022
Titre abrégé: ACS Photonics
Pays: United States
ID NLM: 101634366
Informations de publication
Date de publication:
16 Feb 2022
16 Feb 2022
Historique:
entrez:
4
10
2022
pubmed:
5
10
2022
medline:
5
10
2022
Statut:
ppublish
Résumé
Nanoelectro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus, hindering the mass-scale utilization. We have developed a CMOS technology platform for nanoelectro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for an enhanced optomechanical interaction. Room-temperature operation of devices at 2 GHz and with peak sensitivity down to 2.6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains.
Identifiants
pubmed: 36193113
doi: 10.1021/acsphotonics.1c01614
pmc: PMC9523580
doi:
Types de publication
Journal Article
Langues
eng
Pagination
413-419Informations de copyright
© 2022 American Chemical Society.
Déclaration de conflit d'intérêts
The authors declare no competing financial interest.
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