Hybrid ray-tracing/Fourier optics method to analyze multilayer diffractive optical elements.

The performance (paraxial phase delay) of conventional diffractive optical elements is generally analyzed using the analytical scalar theory of diffraction, based on thin-element approximation (TEA). However, the high thickness of multilayer diffractive optical elements (MLDOEs) means that TEA yields inaccurate results. To address this, we tested a method based on ray-tracing simulations in mid-wave and long-wave infrared wave bands and for multiple