Raman Spectroscopy and Spectral Signatures of AlScN/Al
Raman spectroscopy
alloy scattering
aluminium scandium nitride
piezoelectric films
temperature coefficient
Journal
Micromachines
ISSN: 2072-666X
Titre abrégé: Micromachines (Basel)
Pays: Switzerland
ID NLM: 101640903
Informations de publication
Date de publication:
11 Nov 2022
11 Nov 2022
Historique:
received:
20
09
2022
revised:
04
11
2022
accepted:
08
11
2022
entrez:
24
11
2022
pubmed:
25
11
2022
medline:
25
11
2022
Statut:
epublish
Résumé
III-V solid solutions are sensitive to growth conditions due to their stochastic nature. The highly crystalline thin films require a profound understanding of the material properties and reliable means of their determination. In this work, we have investigated the Raman spectral fingerprint of Al1-xScxN thin films with Sc concentrations
Identifiants
pubmed: 36422390
pii: mi13111961
doi: 10.3390/mi13111961
pmc: PMC9693301
pii:
doi:
Types de publication
Journal Article
Langues
eng
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