Putting High-Index Cu on the Map for High-Yield, Dry-Transferred CVD Graphene.

2D material CVD data science dry transfer graphene high electron mobility single crystal

Journal

ACS nano
ISSN: 1936-086X
Titre abrégé: ACS Nano
Pays: United States
ID NLM: 101313589

Informations de publication

Date de publication:
03 Jan 2023
Historique:
entrez: 3 1 2023
pubmed: 4 1 2023
medline: 4 1 2023
Statut: aheadofprint

Résumé

Reliable, clean transfer and interfacing of 2D material layers are technologically as important as their growth. Bringing both together remains a challenge due to the vast, interconnected parameter space. We introduce a fast-screening descriptor approach to demonstrate holistic data-driven optimization across the entirety of process steps for the graphene-Cu model system. We map the crystallographic dependences of graphene chemical vapor deposition, interfacial Cu oxidation to decouple graphene, and its dry delamination across inverse pole figures. Their overlay enables us to identify hitherto unexplored (168) higher index Cu orientations as overall optimal orientations. We show the effective preparation of such Cu orientations via epitaxial close-space sublimation and achieve mechanical transfer with a very high yield (>95%) and quality of graphene domains, with room-temperature electron mobilities in the range of 40000 cm

Identifiants

pubmed: 36594782
doi: 10.1021/acsnano.2c09253
pmc: PMC9878973
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Références

Chem Mater. 2020 Sep 22;32(18):7766-7776
pubmed: 32982043
Nano Lett. 2013 Aug 14;13(8):3517-23
pubmed: 23799800
Adv Mater. 2019 Mar;31(9):e1800996
pubmed: 30277604
Adv Mater. 2019 Aug;31(35):e1903615
pubmed: 31264306
Adv Mater. 2015 Feb 25;27(8):1376-82
pubmed: 25523458
Nano Lett. 2014 Oct 8;14(10):5706-11
pubmed: 25207847
J Am Chem Soc. 2010 Jun 16;132(23):8175-9
pubmed: 20527937
Sci Adv. 2015 Jul 31;1(6):e1500222
pubmed: 26601221
J Phys Chem Lett. 2015 Jul 16;6(14):2714-21
pubmed: 26240694
Nano Lett. 2011 Aug 10;11(8):3190-6
pubmed: 21696186
Nat Mater. 2011 Jun;10(6):443-9
pubmed: 21552269
ACS Nano. 2020 Oct 27;14(10):13593-13601
pubmed: 33001624
ACS Appl Mater Interfaces. 2016 Dec 7;8(48):33072-33082
pubmed: 27934130
Sci Rep. 2014 Oct 07;4:6541
pubmed: 25286970
Nat Commun. 2015 Sep 29;6:8429
pubmed: 26416349
Nat Commun. 2018 Apr 12;9(1):1413
pubmed: 29650955
Adv Mater. 2018 Feb;30(6):
pubmed: 29266426
ACS Nano. 2022 Jan 25;16(1):285-294
pubmed: 34965103
Adv Mater. 2021 Sep;33(37):e2102697
pubmed: 34309933
ACS Nano. 2019 Aug 27;13(8):8926-8935
pubmed: 31322332
ACS Nano. 2019 Feb 26;13(2):2114-2126
pubmed: 30642169
Adv Mater. 2019 Jun;31(24):e1900880
pubmed: 31034137
Nature. 2019 Sep;573(7775):507-518
pubmed: 31554977
Nano Lett. 2010 Sep 8;10(9):3512-6
pubmed: 20677798
Nanoscale. 2020 Nov 12;12(43):22234-22244
pubmed: 33141137
RSC Adv. 2020 Sep 28;10(59):35671-35680
pubmed: 35517093
Science. 2009 Jun 5;324(5932):1312-4
pubmed: 19423775
Nat Commun. 2022 Mar 16;13(1):1392
pubmed: 35296657
Nat Commun. 2012;3:1024
pubmed: 22929781

Auteurs

Oliver J Burton (OJ)

Department of Engineering, University of Cambridge, CambridgeCB3 0FA, United Kingdom.

Zachary Winter (Z)

2nd Institute of Physics A and JARA-FIT, RWTH Aachen University, 52074Aachen, Germany.

Kenji Watanabe (K)

Research Center for Functional Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki305-0044, Japan.

Takashi Taniguchi (T)

International Center for Materials Nanoarchitectonics, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki305-0044, Japan.

Bernd Beschoten (B)

2nd Institute of Physics A and JARA-FIT, RWTH Aachen University, 52074Aachen, Germany.

Christoph Stampfer (C)

2nd Institute of Physics A and JARA-FIT, RWTH Aachen University, 52074Aachen, Germany.
Peter Grünberg Institute (PGI-9), Forschungszentrum Jülich, 52425Jülich, Germany.

Stephan Hofmann (S)

Department of Engineering, University of Cambridge, CambridgeCB3 0FA, United Kingdom.

Classifications MeSH