A constant pressure flowmeter for extreme-high vacuum.
Journal
Metrologia
ISSN: 0026-1394
Titre abrégé: Metrologia
Pays: England
ID NLM: 101241528
Informations de publication
Date de publication:
2022
2022
Historique:
entrez:
3
2
2023
pubmed:
4
2
2023
medline:
4
2
2023
Statut:
ppublish
Résumé
We demonstrate operation of a constant-pressure flowmeter capable of generating and accurately measuring flows as low as 2 × 10
Identifiants
pubmed: 36733422
doi: 10.1088/1681-7575/ac7927
pmc: PMC9890398
mid: NIHMS1855768
doi:
Types de publication
Journal Article
Langues
eng
Subventions
Organisme : Intramural NIST DOC
ID : 9999-NIST
Pays : United States
Références
Metrologia. 2017;54(Technical Suppl):
pubmed: 28216793
J Vac Sci Technol A. 2017 Jul;35(4):
pubmed: 29200610
Metrologia. 2018;55:
pubmed: 30983635
J Vac Sci Technol A. 2018 Mar;36(2):
pubmed: 29881141
Metrologia. 2017 Dec;54(6):S125-S132
pubmed: 29269961