Plasma-Enhanced Atomic Layer Deposition of Molybdenum Oxide Thin Films at Low Temperatures for Hydrogen Gas Sensing.
PEALD
gas sensor
hydrogen
molybdenum oxide
thin films
Journal
ACS applied materials & interfaces
ISSN: 1944-8252
Titre abrégé: ACS Appl Mater Interfaces
Pays: United States
ID NLM: 101504991
Informations de publication
Date de publication:
08 Mar 2023
08 Mar 2023
Historique:
entrez:
8
3
2023
pubmed:
9
3
2023
medline:
9
3
2023
Statut:
aheadofprint
Résumé
Molybdenum oxide thin films are very appealing for gas sensing applications due to their tunable material characteristics. Particularly, the growing demand for developing hydrogen sensors has triggered the exploration of functional materials such as molybdenum oxides (MoO
Identifiants
pubmed: 36888913
doi: 10.1021/acsami.2c19827
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM