Plasma-Induced Surface Modification of Sapphire and Its Influence on Graphene Grown by Plasma-Enhanced Chemical Vapour Deposition.
graphene
plasma enhanced chemical vapor deposition
sapphire surface
surface plasma treatment
Journal
Nanomaterials (Basel, Switzerland)
ISSN: 2079-4991
Titre abrégé: Nanomaterials (Basel)
Pays: Switzerland
ID NLM: 101610216
Informations de publication
Date de publication:
27 Jun 2023
27 Jun 2023
Historique:
received:
30
05
2023
revised:
22
06
2023
accepted:
26
06
2023
medline:
14
7
2023
pubmed:
14
7
2023
entrez:
14
7
2023
Statut:
epublish
Résumé
In this work, we study the influence of the different surface terminations of c-plane sapphire substrates on the synthesis of graphene via plasma-enhanced chemical vapor deposition. The different terminations of the sapphire surface are controlled by a plasma process. A design of experiments procedure was carried out to evaluate the major effects governing the plasma process of four different parameters: i.e., discharge power, time, pressure and gas employed. In the characterization of the substrate, two sapphire surface terminations were identified and characterized by means of contact angle measurements, being a hydrophilic (hydrophobic) surface and the fingerprint of an Al- (OH-) terminated surface, respectively. The defects within the synthesized graphene were analyzed by Raman spectroscopy. Notably, we found that the I
Identifiants
pubmed: 37446468
pii: nano13131952
doi: 10.3390/nano13131952
pmc: PMC10343755
pii:
doi:
Types de publication
Journal Article
Langues
eng
Subventions
Organisme : Generalitat Valenciana
ID : CIAPOS/2021/293
Organisme : Generalitat Valenciana
ID : CDEIGENT/2020/009
Organisme : Generalitat Valenciana
ID : SEJIGENT/2021/039
Organisme : Ministerio de Ciencia e Innovación, Spain
ID : PID2020-118855RB-I00
Organisme : Ministerio de Ciencia e Innovación, Spain
ID : PID2021-128442NA-I00
Organisme : Generalitat Valenciana
ID : MFA/2022/025
Organisme : European Union NextGenerationEU
ID : PRTR-C17.I1
Organisme : European Regional Development Fund
ID : ERDF
Organisme : Ministerio de Ciencia e Innovación, Spain
ID : Advanced Materials program
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