Advances in Silicon-Based Integrated Lidar.
FMCW
OPA Lidar
ToF
optical switch Lidar
silicon-based Lidar
Journal
Sensors (Basel, Switzerland)
ISSN: 1424-8220
Titre abrégé: Sensors (Basel)
Pays: Switzerland
ID NLM: 101204366
Informations de publication
Date de publication:
26 Jun 2023
26 Jun 2023
Historique:
received:
19
05
2023
revised:
21
06
2023
accepted:
24
06
2023
medline:
17
7
2023
pubmed:
14
7
2023
entrez:
14
7
2023
Statut:
epublish
Résumé
Silicon-based Lidar is an ideal way to reduce the volume of the Lidar and realize monolithic integration. It removes the moving parts in the conventional device and realizes solid-state beam steering. The advantages of low cost, small size, and high beam steering speed have attracted the attention of many researchers. In order to facilitate researchers to quickly understand the research progress and direction, this paper mainly describes the research progress of silicon-based integrated Lidar, including silicon-based optical phased array Lidar, silicon-based optical switch array Lidar, and continuous frequency-modulated wave Lidar. In addition, we also introduced the scanning modes and working principles of other kinds of Lidar, such as the Micro-Electro-Mechanical System, mechanical Lidar, etc., and analyzed the characteristics of the Lidars above. Finally, we summarized this paper and put forward the future expectations of silicon-based integrated Lidar.
Identifiants
pubmed: 37447770
pii: s23135920
doi: 10.3390/s23135920
pmc: PMC10346769
pii:
doi:
Substances chimiques
Silicon
Z4152N8IUI
Types de publication
Journal Article
Review
Langues
eng
Sous-ensembles de citation
IM
Subventions
Organisme : National Natural Science Foundation of China
ID : 61905063
Références
Sensors (Basel). 2023 Feb 01;23(3):
pubmed: 36772636
Opt Express. 2019 Apr 1;27(7):9965-9974
pubmed: 31045144
Opt Lett. 2017 Oct 15;42(20):4091-4094
pubmed: 29028020
Nature. 2022 Mar;603(7900):253-258
pubmed: 35264759
Opt Express. 2021 May 24;29(11):16547-16562
pubmed: 34154215
Sensors (Basel). 2023 Mar 14;23(6):
pubmed: 36991824
Sensors (Basel). 2020 May 20;20(10):
pubmed: 32443805
Appl Opt. 2005 Sep 10;44(26):5429-33
pubmed: 16161656
Appl Opt. 2015 Nov 20;54(33):9654-64
pubmed: 26836520
Opt Express. 2018 Feb 5;26(3):2528-2534
pubmed: 29401791
Nature. 2013 Jan 10;493(7431):195-9
pubmed: 23302859
Nature. 2020 May;581(7807):164-170
pubmed: 32405018
Opt Express. 2010 Jun 21;18(13):13655-60
pubmed: 20588499
Opt Express. 2011 Oct 24;19(22):21595-604
pubmed: 22109008
Opt Express. 2006 Nov 27;14(24):11622-30
pubmed: 19529582
Opt Express. 2022 Feb 14;30(4):5008-5018
pubmed: 35209472
Sensors (Basel). 2021 Dec 22;22(1):
pubmed: 35009592
Opt Lett. 2016 Feb 15;41(4):836-9
pubmed: 26872201
Opt Lett. 2014 Aug 1;39(15):4575-8
pubmed: 25078232
Opt Express. 2009 Jun 22;17(13):10457-65
pubmed: 19550441
Opt Lett. 2009 May 1;34(9):1477-9
pubmed: 19412311
Nature. 2021 Feb;590(7845):256-261
pubmed: 33568821
Opt Express. 2019 Feb 4;27(3):3642-3663
pubmed: 30732381