Al
3C-SiC
ALD
WBG
dielectrics
high-κ
Journal
Materials (Basel, Switzerland)
ISSN: 1996-1944
Titre abrégé: Materials (Basel)
Pays: Switzerland
ID NLM: 101555929
Informations de publication
Date de publication:
15 Aug 2023
15 Aug 2023
Historique:
received:
01
08
2023
revised:
10
08
2023
accepted:
14
08
2023
medline:
26
8
2023
pubmed:
26
8
2023
entrez:
26
8
2023
Statut:
epublish
Résumé
Metal-oxide-semiconductor (MOS) capacitors with Al
Identifiants
pubmed: 37629929
pii: ma16165638
doi: 10.3390/ma16165638
pmc: PMC10456437
pii:
doi:
Types de publication
Journal Article
Langues
eng
Références
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pubmed: 24367741
Sci Rep. 2016 Oct 10;6:34945
pubmed: 27721493
Materials (Basel). 2022 Jan 22;15(3):
pubmed: 35160775
Sci Technol Adv Mater. 2019 May 23;20(1):465-496
pubmed: 31164953
Materials (Basel). 2021 Oct 05;14(19):
pubmed: 34640228
Chem Rev. 2010 Jan;110(1):111-31
pubmed: 19947596