Over- and Undercoordinated Atoms as a Source of Electron and Hole Traps in Amorphous Silicon Nitride (a-Si

amorphous silicon nitride flash memory intrinsic charge trapping sites nonradiative multi-phonon model

Journal

Nanomaterials (Basel, Switzerland)
ISSN: 2079-4991
Titre abrégé: Nanomaterials (Basel)
Pays: Switzerland
ID NLM: 101610216

Informations de publication

Date de publication:
09 Aug 2023
Historique:
received: 04 07 2023
revised: 31 07 2023
accepted: 04 08 2023
medline: 26 8 2023
pubmed: 26 8 2023
entrez: 26 8 2023
Statut: epublish

Résumé

Silicon nitride films are widely used as the charge storage layer of charge trap flash (CTF) devices due to their high charge trap densities. The nature of the charge trapping sites in these materials responsible for the memory effect in CTF devices is still unclear. Most prominently, the Si dangling bond or

Identifiants

pubmed: 37630870
pii: nano13162286
doi: 10.3390/nano13162286
pmc: PMC10460034
pii:
doi:

Types de publication

Journal Article

Langues

eng

Subventions

Organisme : European Union's Horizon 2020
ID : 871813
Organisme : Christian Doppler Research Association
ID : 1577886

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Auteurs

Christoph Wilhelmer (C)

Christian Doppler Laboratory for Single-Defect Spectroscopy in Semiconductor Devices, Institute for Microelectronics, TU Wien, 1040 Wien, Austria.
Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, 1040 Wien, Austria.

Dominic Waldhoer (D)

Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, 1040 Wien, Austria.

Lukas Cvitkovich (L)

Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, 1040 Wien, Austria.

Diego Milardovich (D)

Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, 1040 Wien, Austria.

Michael Waltl (M)

Christian Doppler Laboratory for Single-Defect Spectroscopy in Semiconductor Devices, Institute for Microelectronics, TU Wien, 1040 Wien, Austria.

Tibor Grasser (T)

Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, 1040 Wien, Austria.

Classifications MeSH