KSEMAW: an open source software for the analysis of spectrophotometric, ellipsometric and photothermal deflection spectroscopy measurements.

complex refractive index ellipsometric measurements film thickness open source software optical characterization spectrophotometric measurements thin film

Journal

Open research Europe
ISSN: 2732-5121
Titre abrégé: Open Res Eur
Pays: Belgium
ID NLM: 9918230081006676

Informations de publication

Date de publication:
2021
Historique:
accepted: 07 12 2022
medline: 30 8 2023
pubmed: 30 8 2023
entrez: 30 8 2023
Statut: epublish

Résumé

The optical behavior of devices based on thin films is determined by complex refractive index and thickness of each slab composing the stack; these important parameters are usually evaluated from photometric and/or ellipsometric spectral measurements, given a model of the stack, by means of dedicated software. In the case of complex multilayer devices, generally a number of simpler specimens (like single-film on substrate) must be preliminarily characterized. This paper introduces the reader to a new open source software for thin film characterization finally released after about 30 years of development. The software has already been used in various fields of physics, such as thin film optical filters, architectural glazing, detectors for high energy physics, solar energy, and, last but not least, photovoltaic devices. Code source files, MS Windows executable, user manual as well as a sample of working directories populated with assorted files can be freely downloaded from the kSEMAW GitHub repository.

Identifiants

pubmed: 37645208
doi: 10.12688/openreseurope.13842.2
pmc: PMC10446058
doi:

Types de publication

Journal Article

Langues

eng

Pagination

95

Informations de copyright

Copyright: © 2023 Montecchi M et al.

Déclaration de conflit d'intérêts

No competing interests were disclosed.

Auteurs

Marco Montecchi (M)

Energy Technologies and Renewable Sources Department, ENEA Research Center Casaccia, Roma, 00123, Italy.

Alberto Mittiga (A)

Energy Technologies and Renewable Sources Department, ENEA Research Center Casaccia, Roma, 00123, Italy.

Claudia Malerba (C)

Energy Technologies and Renewable Sources Department, ENEA Research Center Casaccia, Roma, 00123, Italy.

Francesca Menchini (F)

Energy Technologies and Renewable Sources Department, ENEA Research Center Casaccia, Roma, 00123, Italy.
Department of Information Engineering, Electronics and telecommunications, University of Roma, Roma, Italy.

Classifications MeSH