The effects of helium, strontium, and silver triple ions implanted into SiC.
Cavities
He-bubbles
Implantation
SiC
Journal
Heliyon
ISSN: 2405-8440
Titre abrégé: Heliyon
Pays: England
ID NLM: 101672560
Informations de publication
Date de publication:
Oct 2023
Oct 2023
Historique:
received:
14
06
2023
revised:
09
09
2023
accepted:
09
10
2023
medline:
23
10
2023
pubmed:
23
10
2023
entrez:
23
10
2023
Statut:
epublish
Résumé
The effects of helium (He), silver (Ag) and strontium (Sr) ions triple implanted into polycrystalline silicon carbide (SiC) were investigated. Ag ions of 360 keV were first implanted into polycrystalline SiC to a fluence of 2 × 10
Identifiants
pubmed: 37867893
doi: 10.1016/j.heliyon.2023.e20877
pii: S2405-8440(23)08085-4
pmc: PMC10585298
doi:
Types de publication
Journal Article
Langues
eng
Pagination
e20877Informations de copyright
© 2023 The Authors. Published by Elsevier Ltd.
Déclaration de conflit d'intérêts
The authors declare no conflicts of interest.
Références
PLoS One. 2013;8(3):e57760
pubmed: 23505440
Materials (Basel). 2018 Feb 11;11(2):
pubmed: 29439460
Int J Mol Sci. 2021 Jun 18;22(12):
pubmed: 34207344