Fabrication of a Highly NO
MEMS
ZnO
electron beam lithography
gas sensor
low power consumption
nanofilm
oxygen vacancies
Journal
Micromachines
ISSN: 2072-666X
Titre abrégé: Micromachines (Basel)
Pays: Switzerland
ID NLM: 101640903
Informations de publication
Date de publication:
06 Oct 2023
06 Oct 2023
Historique:
received:
11
09
2023
revised:
30
09
2023
accepted:
03
10
2023
medline:
28
10
2023
pubmed:
28
10
2023
entrez:
28
10
2023
Statut:
epublish
Résumé
Hazardous substances produced by anthropic activities threaten human health and the green environment. Gas sensors, especially those based on metal oxides, are widely used to monitor toxic gases with low cost and efficient performance. In this study, electron beam lithography with two-step exposure was used to minimize the geometries of the gas sensor hotplate to a submicron size in order to reduce the power consumption, reaching 100 °C with 0.09 W. The sensing capabilities of the ZnO nanofilm against NO
Identifiants
pubmed: 37893345
pii: mi14101908
doi: 10.3390/mi14101908
pmc: PMC10609393
pii:
doi:
Types de publication
Journal Article
Langues
eng
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