High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm.
Journal
Scientific reports
ISSN: 2045-2322
Titre abrégé: Sci Rep
Pays: England
ID NLM: 101563288
Informations de publication
Date de publication:
14 Nov 2023
14 Nov 2023
Historique:
received:
14
08
2023
accepted:
06
11
2023
medline:
15
11
2023
pubmed:
15
11
2023
entrez:
14
11
2023
Statut:
epublish
Résumé
Amorphous alumina is highly transparent across the visible spectrum, making it a promising candidate for low-loss waveguiding at short wavelengths. However, previous alumina waveguide demonstrations in the visible region have focused on low- to moderate-confinement waveguides, where the diffuse mode reduces the design flexibility and integration density of photonic integrated circuits. Here, we have developed a high-quality etch mask and a highly selective BCl
Identifiants
pubmed: 37963923
doi: 10.1038/s41598-023-46877-4
pii: 10.1038/s41598-023-46877-4
pmc: PMC10645771
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
19917Informations de copyright
© 2023. The Author(s).
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