Enhanced accuracy through machine learning-based simultaneous evaluation: a case study of RBS analysis of multinary materials.


Journal

Scientific reports
ISSN: 2045-2322
Titre abrégé: Sci Rep
Pays: England
ID NLM: 101563288

Informations de publication

Date de publication:
08 Apr 2024
Historique:
received: 01 12 2023
accepted: 27 03 2024
medline: 9 4 2024
pubmed: 9 4 2024
entrez: 8 4 2024
Statut: epublish

Résumé

We address the high accuracy and precision demands for analyzing large in situ or in operando spectral data sets. A dual-input artificial neural network (ANN) algorithm enables the compositional and depth-sensitive analysis of multinary materials by simultaneously evaluating spectra collected under multiple experimental conditions. To validate the developed algorithm, a case study was conducted analyzing complex Rutherford backscattering spectrometry (RBS) spectra collected in two scattering geometries. The dual-input ANN analysis excelled in providing a systematic analysis and precise results, showcasing its robustness in handling complex data and minimizing user bias. A comprehensive comparison with human supervision analysis and conventional single-input ANN analysis revealed a reduced susceptibility of the dual-input ANN analysis to inaccurately known setup parameters, a common challenge in material characterization. The developed multi-input approach can be extended to a wide range of analytical techniques, in which the combined analysis of measurements performed under different experimental conditions is beneficial for disentangling details of the material properties.

Identifiants

pubmed: 38589457
doi: 10.1038/s41598-024-58265-7
pii: 10.1038/s41598-024-58265-7
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

8186

Subventions

Organisme : EU infrastructure network RADIATE
ID : 824096

Informations de copyright

© 2024. The Author(s).

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Auteurs

Goele Magchiels (G)

Quantum Solid-State Physics, KU Leuven, Celestijnenlaan 200D, 3001, Leuven, Belgium. goele.magchiels@kuleuven.be.

Niels Claessens (N)

Quantum Solid-State Physics, KU Leuven, Celestijnenlaan 200D, 3001, Leuven, Belgium.
IMEC, Kapeldreef 75, 3001, Leuven, Belgium.

Johan Meersschaut (J)

IMEC, Kapeldreef 75, 3001, Leuven, Belgium.

André Vantomme (A)

Quantum Solid-State Physics, KU Leuven, Celestijnenlaan 200D, 3001, Leuven, Belgium.

Classifications MeSH