Study of the Long-Term High-Temperature Structural Stability of RuAl Electrodes for Microelectronic Devices.
AlRu
CTGS
RuAl electrodes
aluminum alloy
high-temperature sensor
interconnects
Journal
Materials (Basel, Switzerland)
ISSN: 1996-1944
Titre abrégé: Materials (Basel)
Pays: Switzerland
ID NLM: 101555929
Informations de publication
Date de publication:
18 May 2024
18 May 2024
Historique:
received:
08
04
2024
revised:
06
05
2024
accepted:
15
05
2024
medline:
25
5
2024
pubmed:
25
5
2024
entrez:
25
5
2024
Statut:
epublish
Résumé
The high-temperature stability of RuAl-based electrodes for application in microelectronic devices is analyzed for long-term duration. The electrodes are prepared on Ca
Identifiants
pubmed: 38793497
pii: ma17102431
doi: 10.3390/ma17102431
pii:
doi:
Types de publication
Journal Article
Langues
eng
Subventions
Organisme : Federal Ministry for Economic Affairs and Climate Action
ID : 03ET1589 A
Organisme : Deutsche Forschungsgemeinschaft
ID : 470028346