Laser-Induced Periodic Surface Structures and Their Application for Gas Sensing.
laser ablation
laser-induced periodic surface structure
optical gas sensing
semiconducting metal oxides
Journal
Micromachines
ISSN: 2072-666X
Titre abrégé: Micromachines (Basel)
Pays: Switzerland
ID NLM: 101640903
Informations de publication
Date de publication:
17 Sep 2024
17 Sep 2024
Historique:
received:
31
07
2024
revised:
11
09
2024
accepted:
12
09
2024
medline:
28
9
2024
pubmed:
28
9
2024
entrez:
28
9
2024
Statut:
epublish
Résumé
Semiconducting metal oxides are widely used for solar cells, photo-catalysis, bio-active materials and gas sensors. Besides the material properties of the semiconductor being used, the specific surface topology of the sensors determines device performance. This study presents different approaches for increasing the sensing area of semiconducting metal oxide gas sensors. Micro- and nanopatterned laser-induced periodic surface structures (LIPSSs) are generated on silicon, Si/SiO
Identifiants
pubmed: 39337821
pii: mi15091161
doi: 10.3390/mi15091161
pii:
doi:
Types de publication
Journal Article
Langues
eng
Subventions
Organisme : the Austrian Agency for International Cooperation in Education and Research (OeAD-GmbH), Scientific Grant Agency of the Ministry of Education of the Slovak Republic and of the Slovak Academy of Sciences, Slovak Research and Development Agency under contr
ID : Action Austria- Slovakia No. 2022-03-15-002, No. 1/0789/21, No. APVV- 21-0278