Air Leakages at Microvalves: Pressure Decay Measurements and Extended Continuum Modelling of Knudsen Flows.

OpenFOAM experimental characterization flap valves leakage measurement microvalve pressure decay silicon simulation

Journal

Micromachines
ISSN: 2072-666X
Titre abrégé: Micromachines (Basel)
Pays: Switzerland
ID NLM: 101640903

Informations de publication

Date de publication:
16 Oct 2024
Historique:
received: 19 09 2024
revised: 12 10 2024
accepted: 12 10 2024
medline: 26 10 2024
pubmed: 26 10 2024
entrez: 26 10 2024
Statut: epublish

Résumé

To improve the performance of valves in relation to the leakage rate, a comprehensive evaluation of the valve characteristics and behavior during pressure exposure is important. Often, these low gas flow rates below 0.1 cm

Identifiants

pubmed: 39459137
pii: mi15101263
doi: 10.3390/mi15101263
pii:
doi:

Types de publication

Journal Article

Langues

eng

Subventions

Organisme : Deutsche Forschungsgemeinschaft
ID : KU 3410/1-1
Organisme : EIC
ID : 101115233

Auteurs

Daniel Anheuer (D)

Fraunhofer Institute for Electronic Microsystems and Solid State Technologies, 80686 Munich, Germany.

Johannes Schwarz (J)

Fraunhofer Institute for Electronic Microsystems and Solid State Technologies, 80686 Munich, Germany.

Patrick Debera (P)

Fraunhofer Institute for Electronic Microsystems and Solid State Technologies, 80686 Munich, Germany.

Klaus Heinrich (K)

Fraunhofer Institute for Electronic Microsystems and Solid State Technologies, 80686 Munich, Germany.

Christoph Kutter (C)

Fraunhofer Institute for Electronic Microsystems and Solid State Technologies, 80686 Munich, Germany.

Martin Richter (M)

Fraunhofer Institute for Electronic Microsystems and Solid State Technologies, 80686 Munich, Germany.

Classifications MeSH