Air Leakages at Microvalves: Pressure Decay Measurements and Extended Continuum Modelling of Knudsen Flows.
OpenFOAM
experimental characterization
flap valves
leakage
measurement
microvalve
pressure decay
silicon
simulation
Journal
Micromachines
ISSN: 2072-666X
Titre abrégé: Micromachines (Basel)
Pays: Switzerland
ID NLM: 101640903
Informations de publication
Date de publication:
16 Oct 2024
16 Oct 2024
Historique:
received:
19
09
2024
revised:
12
10
2024
accepted:
12
10
2024
medline:
26
10
2024
pubmed:
26
10
2024
entrez:
26
10
2024
Statut:
epublish
Résumé
To improve the performance of valves in relation to the leakage rate, a comprehensive evaluation of the valve characteristics and behavior during pressure exposure is important. Often, these low gas flow rates below 0.1 cm
Identifiants
pubmed: 39459137
pii: mi15101263
doi: 10.3390/mi15101263
pii:
doi:
Types de publication
Journal Article
Langues
eng
Subventions
Organisme : Deutsche Forschungsgemeinschaft
ID : KU 3410/1-1
Organisme : EIC
ID : 101115233