Bottom-up Filling of Damascene Trenches with Gold in a Sulfite Electrolyte.
Journal
Journal of the Electrochemical Society
ISSN: 0013-4651
Titre abrégé: J Electrochem Soc
Pays: England
ID NLM: 7505603
Informations de publication
Date de publication:
2019
2019
Historique:
entrez:
12
10
2020
pubmed:
1
1
2019
medline:
1
1
2019
Statut:
ppublish
Résumé
Superconformal Au deposition is demonstrated in a Na
Types de publication
Journal Article
Langues
eng
Subventions
Organisme : Intramural NIST DOC
ID : 9999-NIST
Pays : United States
Références
Science. 2014 Jun 6;344(6188):1138-42
pubmed: 24904160
J Electrochem Soc. 2017;164(6):D327-D334
pubmed: 28729743