Accelerated Bottom-Up Gold Filling of Metallized Trenches.

Journal

Journal of the Electrochemical Society
ISSN: 0013-4651
Titre abrégé: J Electrochem Soc
Pays: England
ID NLM: 7505603

Informations de publication

Date de publication:
2019
Historique:
entrez: 12 10 2020
pubmed: 1 1 2019
medline: 1 1 2019
Statut: ppublish

Résumé

This work extends previously detailed void-free, bottom-up feature filling in a near-neutral Na

Identifiants

PMID: 33041356 PMC: PMC7543056
pubmed: 33041356
pmc: PMC7543056
mid: NIHMS1613499
pii:

Types de publication

Journal Article

Langues

eng

Subventions

Organisme : Intramural NIST DOC
ID : 9999-NIST
Pays : United States

Références

J Electrochem Soc. 2017;164(6):D327-D334
pubmed: 28729743
ECS Trans. 2016;163(7):D322-D331
pubmed: 29503673

Auteurs

D Josell (D)

Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
ORCID: 0000-0002-4273-1923

M E Williams (ME)

Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.

S Ambrozik (S)

Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
ORCID: 0000-0003-3660-1687

C Zhang (C)

Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.

T P Moffat (TP)

Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
ORCID: 0000-0003-4377-1692

Classifications MeSH