Analysis of Electric Field Distribution for SOI-FET Sensors with Dielectrophoretic Control.


Journal

Sensors (Basel, Switzerland)
ISSN: 1424-8220
Titre abrégé: Sensors (Basel)
Pays: Switzerland
ID NLM: 101204366

Informations de publication

Date de publication:
23 Mar 2022
Historique:
received: 31 01 2022
revised: 11 03 2022
accepted: 17 03 2022
entrez: 12 4 2022
pubmed: 13 4 2022
medline: 14 4 2022
Statut: epublish

Résumé

Silicon-on-insulator (SOI) nanowire or nanoribbon field-effect transistor (FET) biosensors are versatile platforms of electronic detectors for the real-time, label-free, and highly sensitive detection of a wide range of bioparticles. At a low analyte concentration in samples, the target particle diffusion transport to sensor elements is one of the main limitations in their detection. The dielectrophoretic (DEP) manipulation of bioparticles is one of the most successful techniques to overcome this limitation. In this study, TCAD modeling was used to analyze the distribution of the gradient of the electric fields E for the SOI-FET sensors with embedded DEP electrodes to optimize the conditions of the dielectrophoretic delivery of the analyte. Cases with asymmetrical and symmetrical rectangular electrodes with different heights, widths, and distances to the sensor, and with different sensor operation modes were considered. The results showed that the grad

Identifiants

pubmed: 35408075
pii: s22072460
doi: 10.3390/s22072460
pmc: PMC9003046
pii:
doi:

Substances chimiques

Nanotubes, Carbon 0
Silicon Z4152N8IUI

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

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Auteurs

Olga V Naumova (OV)

Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, 630090 Novosibirsk, Russia.

Elza G Zaytseva (EG)

Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, 630090 Novosibirsk, Russia.

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Classifications MeSH