Robust Bottom-Up Gold Filling of Deep Trenches and Gratings.
Electroplating
Gold
Gratings
Superconformal
Journal
Journal of the Electrochemical Society
ISSN: 0013-4651
Titre abrégé: J Electrochem Soc
Pays: England
ID NLM: 7505603
Informations de publication
Date de publication:
2022
2022
Historique:
entrez:
20
3
2023
pubmed:
1
1
2022
medline:
1
1
2022
Statut:
ppublish
Résumé
This work extends an extreme variant of superconformal Au electrodeposition to deeper device architectures while exploring factors that constrain its function and the robustness of void-free processing. The unconventional bottom-up process is used to fill diffraction gratings with trenches 94 μm deep and 305 μm deep, with aspect ratios (height/width) of just below 20 and 15, respectively, in near-neutral 0.16 mol·L
Identifiants
pubmed: 36936547
doi: 10.1149/1945-7111/ac5c0b
pmc: PMC10020987
mid: NIHMS1874088
doi:
Types de publication
Journal Article
Langues
eng
Subventions
Organisme : Intramural NIST DOC
ID : 9999-NIST
Pays : United States
Références
Nat Commun. 2012 Jul 10;3:947
pubmed: 22781760
J Electrochem Soc. 2017;164(6):D327-D334
pubmed: 28729743
Opt Express. 2005 Aug 8;13(16):6296-304
pubmed: 19498642
J Electrochem Soc. 2021;168(11):
pubmed: 36936718
Opt Express. 2021 Jan 18;29(2):2049-2064
pubmed: 33726406
Opt Express. 2019 May 27;27(11):15943-15955
pubmed: 31163783
Micromachines (Basel). 2021 May 07;12(5):
pubmed: 34066906
Phys Rev Lett. 2010 Dec 10;105(24):248102
pubmed: 21231558
Eur Radiol. 2020 Mar;30(3):1419-1425
pubmed: 31440834
Eur Radiol Exp. 2021 Jan 26;5(1):6
pubmed: 33495889
Philos Trans A Math Phys Eng Sci. 2014 Jan 27;372(2010):20130027
pubmed: 24470411
Med Phys. 1997 Nov;24(11):1661-70
pubmed: 9394272
J Electrochem Soc. 2021;168(8):
pubmed: 36938320
J Electrochem Soc. 2019;166(12):
pubmed: 33041356
Lancet Digit Health. 2021 Nov;3(11):e733-e744
pubmed: 34711378
Sci Rep. 2019 Jun 18;9(1):8699
pubmed: 31213645
J Electrochem Soc. 2019;166(16):
pubmed: 33041357
Radiology. 2021 Nov;301(2):389-395
pubmed: 34427464