Matthias Erig

Affiliations

Forschung und Entwicklung, GB Sensorik, paragon GmbH & Co KGaA, Schwalbenweg 29, Delbrück, 33129, Germany.

Publications (1)

From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications.

Small (Weinheim an der Bergstrasse, Germany)

Avec: Lukas Mai , Felix Mitschker , Claudia Bock , Alessia Niesen , Engin Ciftyurek , Detlef Rogalla , Johannes Mickler , Matthias Erig , Zheshen Li , Peter Awakowicz , Klaus Schierbaum , Anjana Devi

Réseau de co-auteurs

Lukas Mai 1 collaboration

Felix Mitschker 1 collaboration

Claudia Bock 1 collaboration

Alessia Niesen 1 collaboration

Engin Ciftyurek 1 collaboration

Detlef Rogalla 1 collaboration

Johannes Mickler 1 collaboration

Zheshen Li 1 collaboration

Peter Awakowicz 1 collaboration

Klaus Schierbaum 1 collaboration

Anjana Devi 1 collaboration