Accueil
Matthias Erig
Matthias Erig
Affiliations
Forschung und Entwicklung, GB Sensorik, paragon GmbH & Co KGaA, Schwalbenweg 29, Delbrück, 33129, Germany.
Publications (1)
From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications.
Small (Weinheim an der Bergstrasse, Germany)
Avec:
Lukas Mai
,
Felix Mitschker
,
Claudia Bock
,
Alessia Niesen
,
Engin Ciftyurek
,
Detlef Rogalla
,
Johannes Mickler
,
Matthias Erig
,
Zheshen Li
,
Peter Awakowicz
,
Klaus Schierbaum
,
Anjana Devi
Réseau de co-auteurs
Lukas Mai
1 collaboration
Felix Mitschker
1 collaboration
Claudia Bock
1 collaboration
Alessia Niesen
1 collaboration
Engin Ciftyurek
1 collaboration
Detlef Rogalla
1 collaboration
Johannes Mickler
1 collaboration
Zheshen Li
1 collaboration
Peter Awakowicz
1 collaboration
Klaus Schierbaum
1 collaboration
Anjana Devi
1 collaboration